Meskipun adopsi perangkat MEMS di smartphone tidak memegang sampai Apple menggunakan accelerometers pada tahun 2008 untuk mendeteksi gerakan di iPhone -nya , perangkat ini sekarang berisi sebanyak 12 MEMS chip masing-masing , dan bersama dengan tablet diperkirakan akan tetap peluang pertumbuhan untuk MEMS perangkat . Untuk industri MEMS secara keseluruhan , analis di Yole Développement mengharapkan CAGR 12 sampai 13 persen melalui 2018 , menghasilkan $ 22500000000 , 23,5 miliar satuan MEMS pasar .
Ada empat jenis utama sensor MEMS digunakan dalam aplikasi konsumen :
1 ) Smartphone otomatis menyesuaikan orientasi layar sebagai hasil dari MEMS accelerometer onboard. Ini terdiri dari sedikit lebih dari satu balok kantilever dengan apa yang disebut " bukti massa " dan piring terpasang melalui sistem suspensi mekanis kecil . Ketika massa mengalihkan dari posisi netral itu menciptakan perbedaan kapasitansi dalam ruang bebas ( udara) kapasitansi antara pelat . Perubahan ini dapat diukur dan dilaporkan ke mikrokontroler untuk tindakan lebih lanjut . MEMS accelerometers dapat mendeteksi kemiringan untuk secara tepat posisi kesehatan peralatan scanning serta menentukan apakah perangkat seperti laptop telah jatuh dan jatuh .
2 ) MEMS giroskop mengukur rotasi obyek di sekitar satu atau lebih sumbu . Mereka memungkinkan aplikasi seperti optical image stabilization untuk kamera digital dan digunakan untuk membuat video game menarik . Kebanyakan MEMS giroskop sekarang menggunakan konfigurasi garpu tala . Dua massa bergerak disimpan dalam gerakan terus-menerus dalam arah yang berlawanan . Ketika diputar , gaya Coriolis ( artefak dari rotasi bumi : objek membelokkan ke kanan di belahan bumi utara dan ke kiri di belahan bumi selatan ) menggerakkan sepasang massa berosilasi dalam arah yang berlawanan , yang menghasilkan perubahan kapasitansi . Sirkuit elektronik mengukur variasi kapasitansi yang , pada gilirannya , menentukan perubahan arah .
3 ) sensor tekanan Silicon menggunakan teknologi MEMS untuk menyediakan pengukuran resolusi tinggi tekanan dan karena ketinggian , untuk navigasi dalam ruangan atau bertindak sebagai barometer di smartphone , jam tangan olahraga dan monitor cuaca . Sensor tekanan juga menentukan tekanan manifold dalam mesin mobil serta kekuatan jari dan pergelangan tangan - tipe monitor tekanan darah bagi orang-orang . The MEMS sensor tekanan bekerja menggunakan diafragma dan dua resistor variabel (a strain gage ) . Ketika pembacaan tekanan atas dan di bawah sirkuit penginderaan berbeda , membran flexes menyebabkan perubahan dalam perlawanan , sebuah IC berkorelasi bahwa dengan tekanan yang sesuai .
4 ) Mampu mengukur medan magnet bumi bersama beberapa sumbu , sensor geomagnetik memungkinkan pelaksanaan e - kompas dan navigasi fungsi untuk perangkat portabel . AMR ( anisotropic magneto - resistance ) adalah teknologi yang paling populer digunakan untuk sensor magnetik manufaktur silikon .
Magneto - resistance ( MR ) adalah milik garis tipis dari bahan besi ( seperti NiFe paduan ) yang menunjukkan perubahan resistensi bila terkena medan magnet . Disebut Anisotropic MR adalah karena tergantung pada sudut antara arus listrik dan arah magnetisasi . Menggabungkan sirkuit elektronik informasi ini dapat menentukan arah dan besarnya medan magnet bumi untuk perangkat navigasi perhitungan mati menyediakan lokasi di lingkungan GPS - ditolak .
Dan ini MEMS ini ternyata sangat membantu di kehidupan kita sehari hari, contohnya MEMS di gunaan untuk mengukur suatu resolusi tingkat tekanan dari suatu ketinggian. Dan juga sebagai penentu arah mata angin.
Sumber :
http://www.ce.org/i3/Innovate/2014/January-February/MEMS-Based-Sensors-Crucial-in-Smart-CE#sthash.UgJ4cc2A.dpuf
What could link a sensor used to detect head impacts in football helmets to DNA chips, inkjet printer heads, devices that determine display orientation in smartphones and image stabilizer systems in digital cameras? The answer is they all depend on MEMS (micro electromechanical systems) technology.
MEMS devices are miniaturized mechanical systems produced using a semiconductor fabrication technique. The use of this construction method not only makes possible the reduction of sensor dimensions (MEMS devices range in size from 20 micrometers to one millimeter) but also allows the integration of both mechanical and electronic components on a single chip.
Even though adoption of MEMS devices in smartphones did not take hold until Apple used accelerometers in 2008 to detect motion in its iPhone, these devices now contain as many as 12 MEMS chips each, and along with tablets are expected to remain a growth opportunity for MEMS devices. For the MEMS industry as a whole, analysts at Yole Développement expect a 12 to 13 percent CAGR through 2018, resulting in a $22.5 billion, 23.5 billion unit MEMS market.
There are four primary types of MEMS sensors used in consumer applications:
1) Smartphones automatically adjust screen orientation as a result of an onboard MEMS accelerometer. It consists of little more than a cantilever beam with what is called a “proof mass” and plates attached via the tiny mechanical suspension system. When the mass deflects from its neutral position it creates a capacitance difference in the free space (air) capacitance between the plates. This change can be measured and reported to a microcontroller for further action. MEMS accelerometers can detect tilt to precisely position healthcare scanning equipment as well as determine if a device such as a laptop has been dropped and is falling.
1) Smartphones automatically adjust screen orientation as a result of an onboard MEMS accelerometer. It consists of little more than a cantilever beam with what is called a “proof mass” and plates attached via the tiny mechanical suspension system. When the mass deflects from its neutral position it creates a capacitance difference in the free space (air) capacitance between the plates. This change can be measured and reported to a microcontroller for further action. MEMS accelerometers can detect tilt to precisely position healthcare scanning equipment as well as determine if a device such as a laptop has been dropped and is falling.
2) MEMS gyroscopes measure the rotation of an object around one or more axis. They enable such applications as optical image stabilization for digital cameras and are used to create exciting video games. Most MEMS gyroscopes now use a tuning fork configuration. Two moving masses are kept in continuous movement in opposite directions. When rotated, the Coriolis force (an artifact of the Earth’s rotation: objects deflect to the right in the Northern Hemisphere and to the left in the Southern Hemisphere) drives the pair of masses to oscillate in opposite directions, which results in a capacitance change. Electronic circuitry measures the variation in capacitance which, in turn, determines changes in direction.
3) Silicon pressure sensors use MEMS technology to provide high resolution measurements of pressure and therefore altitude, for indoor navigation or to act as a barometer in smartphones, sports watches and weather monitors. Pressure sensors also determine manifold pressure in car engines as well as power finger- and wrist-type blood pressure monitors for people. The MEMS pressure sensor works using a diaphragm and two variable resistors (a strain gage). When the pressure readings above and below the sensing circuit are different, the membrane flexes causing a change in resistance; an IC correlates that to the appropriate pressure.
Magneto-resistance (MR) is the property of a thin stripe of ferrous material (such as NiFe alloys) that exhibits a change of resistance when exposed to a magnetic field. Anisotropic MR is so-called because it depends on the angle between the electric current and the magnetization direction. Combining this information electronic circuitry can determine the direction and magnitude of the Earth’s magnetic field for dead reckoning navigation devices providing location in GPS-denied environments.
- See more at: http://www.ce.org/i3/Innovate/2014/January-February/MEMS-Based-Sensors-Crucial-in-Smart-CE#sthash.UgJ4cc2A.dpuf
4) Capable of measuring the earth’s magnetic field along multiple axes, geomagnetic sensors enable the implementation of e-compass and navigation functions for portable devices. AMR (anisotropic magneto-resistance) is the most popular technology used for manufacturing silicon magnetic sensors.
Magneto-resistance (MR) is the property of a thin stripe of ferrous material (such as NiFe alloys) that exhibits a change of resistance when exposed to a magnetic field. Anisotropic MR is so-called because it depends on the angle between the electric current and the magnetization direction. Combining this information electronic circuitry can determine the direction and magnitude of the Earth’s magnetic field for dead reckoning navigation devices providing location in GPS-denied environments.
